Harvard’s CNS to Install the World’s Fastest EBL System

118 Cedar Street Wellesley Hills in Massachusetts (United States) Zip code 02481

Publish date: August 27, 2020 02:51

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Harvards Center for Nanoscale Systems will install North Americas first High Speed Elionix ELS-HS50 electron beam lithography system. This will be the third Elionix electron beam lithography system installed into the Harvard CNS cleanroom.


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Contact: Brian Surowiec

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